Microelectromechanical Systems Books

Micro Electro Mechanical System Design (Mechanical Engineering) by James J Allen

MOEMS: Micro-Opto-Electro-Mechanical Systems by Manouchehr E Motamedi

Slow Rarefied Flows: Theory and Application to Micro-Electro-Mechanical Systems (Progress in Mathematical Physics) by Carlo Cercignani

Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems: Volume 276 (MRS Proceedings) by A Peter Jardine and Andrew Crowson

Fabrication Techniques for III-V Micro-Opto-Electro-Mechanical Systems by Jeremy A Raley